| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4558
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4557
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45514
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-14 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-14 |
| filingDate |
1985-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e214f7586e095174bf70e20eb0274c0d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2566d2eb7d0a95a46e3ef96618e425a7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d5a485df4c6bd06b1a301534a761a02 |
| publicationDate |
1986-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0167703-A2 |
| titleOfInvention |
A method of homogeneous chemical vapour deposition |
| abstract |
In a method of homogeneous chemical vapour deposition in which first (22) and second (20) gases are intermixed at a location (28) in the vicinity of a cool substrate (14) onto which a material is to be deposited, the first gas contains at least one constituent of the material to be deposited and is at a temperature less than its pyrolysis temperature and the second gas is heated (18) to a sufficiently high temperature that the intermixing of the gases causes the first gas to decompose. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9729218-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5302882-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0482648-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2196019-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0238315-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5334277-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5284805-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9301328-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5264040-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5298296-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2643389-A1 |
| priorityDate |
1984-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |