http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0163176-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ca9d6c091836b81c25028fadffcdfcb1 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-211 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-41 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B27-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-21 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06 |
| filingDate | 1985-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a511ae6dde3914101e6ea9d65c58577 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9be5576c8d886783fabbfb8eb766f25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_caa6f042148956b24a8227f88f43a661 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_023a55f006a823140edd64348b86ad06 |
| publicationDate | 1985-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0163176-A2 |
| titleOfInvention | Ellipsometric method and arrangement for monitoring the physical properties of samples or superficial layers of samples |
| abstract | An eiipsometric method and an ellispsometer for examining physical properties of samples, in particular sample surfaces or surface layers of samples, in which the angle settings of the polarizer (2) and analyzer (5) remain fixed during the measurement process on the sample, two or more discrete from each other different predetermined polarization states of the radiation between the polarizer (2) and the sample (3) and / or between the sample (3) and the analyzer (5) can be set by means of polarization modulator elements (41, 42, 43, 44) brought into the beam path and in each discrete state of polarization, the intensity of the radiation polarized in the analyzer (5) is measured and evaluated in a computer (8) to determine the polarization properties of the sample ; will. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-4105192-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19537706-A1 |
| priorityDate | 1984-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.