http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0155225-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_893cc508bf584606b3c1f900b18b7efa |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N22-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N22-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-302 |
| filingDate | 1985-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64c2fc0e5bfff9ba2ba16b95aabc613b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfa758ce0c1e90a8cc888d60abf577ec http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e7a23228d825f18e884dc714ace370a |
| publicationDate | 1985-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0155225-A2 |
| titleOfInvention | Method and devices for the analysis of photosensitive materials by means of microwaves |
| abstract | Changes in optical parameters in a waveguide system, which are caused by excitation of charge carriers in a measurement object positioned in the microwave field, allow clear conclusions to be drawn about the material properties of the measurement object, without the latter being destroyed and having to be contacted.n n n By irradiation with sharply focused photons or electrons - light spot: approx. 0.1 µm to 10 µm in diameter - and by changes in the position of the light spot on the surface of the measurement object - XY displacements of the measurement object over the cross-sectional area of a waveguide with step lengths in the µm range - surface structures such as grain boundaries, steps in layer lattice crystals, manufacturing defects, destruction on the surface and the like of photosensitive semiconductor layers can be determined with high resolution. |
| priorityDate | 1984-02-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.