| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-1184
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-09509
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0554
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-0394
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-1572 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-4084 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-00 |
| filingDate |
1984-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1990-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1990-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0144943-B1 |
| titleOfInvention |
Process using plasma for forming conductive through-holes through a dielectric layer |
| priorityDate |
1983-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |