| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J49-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-248
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 |
| filingDate |
1984-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1989-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1989-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0137649-B1 |
| titleOfInvention |
Apparatus and method for ion implantation |
| priorityDate |
1983-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |