http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0136130-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-36 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 |
| filingDate | 1984-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1989-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1989-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0136130-B1 |
| titleOfInvention | Method of making articles using gas functionalized plasma developed layer |
| priorityDate | 1983-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 41.