| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0e433c1625fc509a087c912b440da84b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-147
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28537
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28518 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52 |
| filingDate |
1984-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3028be7b724509c1d9ec08696d1b484 |
| publicationDate |
1984-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0128304-A1 |
| titleOfInvention |
Method of forming a metallic silicide |
| abstract |
A method of forming a metallic silicide (22) on silicon 10 or polysilicon (14) in which a masking layer such as silicon dioxide (12) is formed on a silicon slice and patterned to expose selected areas of the slice surface. The slice is then sputter etched followed by in situ deposition of a metal layer. The slice is heated to convert the portion of the metal layer in contact with the silicon (10) and/or polysilicon (14) to a metal silicide (22), then the non-converted metal is removed by a selective etchant. The siliciding may be performed in an ambient including nitrogen to prevent out-diffusion of silicon. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5624869-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4873205-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0219827-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0219827-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2226446-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2226446-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0677868-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0321746-A1 |
| priorityDate |
1983-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |