| abstract |
Electron cyclotron resonance ion source in which a plasma is confined in a magnetic configuration comprising a first group of coils (11), located in the plane defined by the sealed window (13) of a microwave injector (8) and surrounding it, providing the magnetic field creating and confining a plasma (10) and a second group of coils (12), fed in counter-field with respect to the first group, surrounding an ion extraction system (14). The extraction of the ions is carried out in a magnetic field clearly lower than that corresponding to the cyclotronic resonance. Said ion source finds many applications in the fields of "vaporization" of thin layers, micro-etchings, ion implantation, accelerators ... etc. |