| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2b8b744d430e252fa21c14c2b8dee176 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S257-90 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823406
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66954 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8234
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-148
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-339 |
| filingDate |
1983-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5618a12bbcc4a10b5e55cde6bc6fc6f |
| publicationDate |
1984-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0099603-A1 |
| titleOfInvention |
Semiconductor device and method of manufacturing same |
| abstract |
A semiconductor device comprising a semiconductor body (1) having a surface (2) provided with a first insulating layer (3). On this layer is disposed a pattern of conductor strips (4) coated with insulation strips (5) with projecting edges (6). Under the edges (6), the conductor strips (4) are coated with insulating tracks (8) which fill the spaces under the edges (6) and which at least at the area where they adjoin the first insulating layer (3) can be etched selectively with respect to this layer (3). As a material for the conductor strips (4) use may be made of materials other than polycrystalline silicon, such as tungsten, molybdenum and silicides. The thickness of the first insulating layer (3) is affected to a very small extent during the manufacture of the device, while its depth remains unchanged. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-3446789-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4724218-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2583573-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0209425-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0214702-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0137554-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0137554-A2 |
| priorityDate |
1982-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |