| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S134-902 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-3021 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
1983-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a9b1c76bacfc86e8252318d2592b87b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d8eff342b54ed10306f104e31d1ec277
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35380afde832f2fa2a17d78f83ef927c |
| publicationDate |
1983-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0089454-A1 |
| titleOfInvention |
Liquid treatment apparatus and method |
| abstract |
A developer apparatus comrises a developing tank (10) arranged with a centrally located rotatable and vertically translatable shaft (20) carrying a workpiece platform (12) at the upper end thereof. Initially, the platform is located above the tank for ease in loading a workpiece, for example an exposed photoresist coated semiconductor device component. The platform and workpiece are then lowered into developing solution in the tank where they are rotated and oscillated vertically for agitational action during a predetermined time period after which they are raised up out of the solution and delayed with continued rotation at a drying station for another predetermined time period. Thereafter, the platform and workpiece are returned to the initial position for workpiece unloading. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4637146-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0223237-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0223237-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0137947-A1 |
| priorityDate |
1982-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |