| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 |
| filingDate |
1983-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9aa63ebdd9546a3e04eaf9e1776f936a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1368471e9fc592ca01e08845c8b34173
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03c0fb135e26f5336d0fdcdcd85b0062 |
| publicationDate |
1983-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0087582-A2 |
| titleOfInvention |
Optical lithography process for creating patterns in a silicon semiconductor substrate |
| abstract |
The invention relates to an optical lithography process for creating patterns in a silicon semiconductor substrate. The improved resolution, as used in the very large scale integration of electronic circuits, is obtained by employing a thin film of 4-phenylazo-1-naphthylamine between the silicon substrate and the overlying layer of a light sensitive photoresist. The 4-phenylazo-1-naphthylamine acts as a stable, highly light absorbent medium exhibiting chemical and physical compatibility with the silicon substrate and photoresists with ether-type solvent systems. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0379924-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0379924-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2259584-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4853313-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0242143-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0242143-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9513551-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0159428-A1 |
| priorityDate |
1982-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |