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filingDate 1982-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f46dd28310de1a67308932702ab1922c
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publicationDate 1982-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-0063272-A1
titleOfInvention Synthesis of silicon nitride
abstract A process for synthesizing silicon nitride by reacting a silicon halide and ammonia at a high temperature, which is characterized by that at least while the reaction product is amorphous, hydrogen and chlorine are burned in a reaction zone where a halogen containing inorganic silicon compound and ammonia, and the reaction of said both reactants is effected by the heat of combustion thus obtained.
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