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filingDate 1981-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3a6c3dd69ec795a9192014dcabbde73
publicationDate 1982-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-0051397-A2
titleOfInvention Thin film transistor array manufacture
abstract Thin film transistor arrays are prepared by a vacuum deposition technique wherein only a single deposition of discrete areas (19) of an insulating material are deposited through a mask. No registration is required to form the various elements of the transistors. A unique structure is described wherein the contact of the semiconductor material with the source electrode (23), the source bus conductors, and the drain electrode (25) is coterminous with conductive material forming the source electrode and bus conductors and the drain electrode.
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