Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a22da5b7dd6ed60a21538e5edb23e051 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-025 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
filingDate |
1981-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6e3d0448f87dbf1485734eb3733a74a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_486029198a569c74a709a4443dc7ffcf |
publicationDate |
1982-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
EP-0045191-A1 |
titleOfInvention |
Process and apparatus for the production of semiconductor bodies |
abstract |
In a process for preparing a body of semiconductor material in which a slim rod (19) of semiconductor material in a chemical vapor deposition chamber (23) is maintained in contact with decomposable gaseous compounds containing semiconductor material at a temperature sufficient for decomposing the gaseous compounds whereby decomposition of the gaseous compounds occurs and semiconductor material is deposited on the slim rod to form an enlarged semiconductor body, a virgin slim rod (19) is pulled in a pulling chamber (9) from a molten semiconductor material source (17) using a seed crystal, the slim rod, maintained at a temperature sufficient for decomposing the said gaseous compounds, is passed continuously into the chemical vapor deposition chamber (23) through a communication passageway (21) between the pulling chamber and the deposition chamber, and the enlarged semiconductor body (33) is pulled continuously from the decomposttion chamber. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010008477-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010008477-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11015244-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10450649-B2 |
priorityDate |
1980-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |