http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0043438-A3
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-426 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B33-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B33-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-10 |
| filingDate | 1981-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1982-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0043438-A3 |
| titleOfInvention | Methylene chloride-methane sulfonic acid stripping compositions and methods for using same |
| abstract | Methylene chloride-methane sulfonic acid composintions used in removing polymeric organic substances from ninorganic substrates, such as polymeric adhesives from nmetal and lense glass parts and positive and negative nphotoresists from metallized silicon/silicon dioxide wafers, nwhich comprise an effective amount, usually about 1 to 40 npercent by weight methane sulfonic acid and the balance nmethylene chloride are described. Methods for using the nabove composition at ambient temperatures to remove the npolymeric organic substances from the metal and non-nmetallic inorganic substrates are also described. |
| priorityDate | 1980-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.