patent/EP-0020857-B1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0020857-B1

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classificationIPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-48
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-495 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-607 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-603 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-48
filingDate	1980-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	1984-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate	1984-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	EP-0020857-B1
titleOfInvention	Method and device for manufacturing a planar semiconductor element
priorityDate	1979-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate

Subject

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-2546443-B2

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http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID783
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23978
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID418354341

Total number of triples: 79.