| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31667
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31935
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L33-068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L33-16 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L33-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L33-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L33-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L33-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
1980-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1983-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1983-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0015459-B1 |
| titleOfInvention |
Article comprising a negative x-ray resist containing poly(2,3-dichloro-1-propyl acrylate) and poly(glycidyl methacrylate-co-ethyl acrylate) and method using this resist |
| priorityDate |
1979-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |