| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-215
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J2365-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-269
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-28 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J3-203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L101-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J3-20 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J3-20 |
| filingDate |
2005-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2008-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EA-200701157-A1 |
| titleOfInvention |
PLASTIC |
| abstract |
The application describes a plastic that, in order to be able to manufacture tribologically loaded parts from it, primarily fixing rings, which are intended for fastening semiconductor wafers in devices for their chemical-mechanical polishing and which would have significantly larger fixing rings compared to those made of known polymer materials service life, consists of a plastic matrix and silicon carbide particles embedded in it. The application also describes a method for manufacturing tribologically loaded parts from such a plastic. |
| priorityDate |
2004-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |