| abstract |
A microelectromechanical gravimetric sensor device with lateral vibration and microfluidic channels is proposed. It is manufactured using the technology of microelectromechanical systems (MEMS), which detects biological cells and substances determined by analysis by measuring the change in mass placed on its surface, and which consists of four main groups including a cavity placed on the base of the microfluidic channel, components of the bioactivation of the resonator, microfluidic channel and microproduction technology Twa. Its main components include sensitive mass (1), comb fingers fixed on sensitive mass (2), bent elastic beams (3), channel bottom and base (4), fixed electrodes (5), comb electrodes attached to fixed electrodes ( 6), a gold film (7) deposited on the mass, molecules with immobilized bio-identification (8) and a microfluidic channel placed on the resonator structure (9). |