http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EA-016692-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2336eb2c801a759be8d1a4ed5644026f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45534 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-403 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-405 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate | 2008-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_986246bd5da3467ea90487f07c436d97 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72881bf7a551a28ee09efa8fa4c04c7e |
| publicationDate | 2012-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EA-016692-B1 |
| titleOfInvention | METHOD OF DEPOSITION OF MATERIALS FROM METAL OXIDES |
| abstract | A method for improving the uniformity of metal oxide coatings obtained by ALD methods or ALD-type methods. The layers are formed using alternating pulses of metal halide and oxygen-containing precursors, preferably water, with purging as needed. The introduction of modifier pulses after the oxygenated precursor pulses has a positive effect on layer uniformity, which typically has gradients, especially in applications with closely spaced substrates. In particular, an improvement in the uniformity of the layer thickness is obtained. In accordance with the invention, alcohols containing from one to three carbon atoms can be used as the modifier. |
| priorityDate | 2007-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 78.