| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e08fd85d97265d6c31ab40f372843d81 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0201
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-0203 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B21D22-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0232
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L- |
| filingDate |
1984-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7a6bdda4c1a2625399bfecd2ca1048e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de5dcab62bd642a956316b7f04156019
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e6c8fa5307d323b9efee9001f892bc9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72c3c8c9e2130e4e9af6ad31dff2f714 |
| publicationDate |
1991-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DK-160113-B |
| titleOfInvention |
PROCEDURE FOR THE PREPARATION OF A SEMICONDUCTOR STRUCTURE |
| priorityDate |
1983-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |