| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31663
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-1031
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24926 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76829
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76808
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76801
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02362
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7681
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31612
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76832
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76834
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76835 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate |
1999-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1abcb2ae70c8fecd4791bf228b25942d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e4cd2dd9fc2908a6e5e7af4d244afd9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79d934e9703a2872f496a3cf6daf891a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ab28d5726d0f1256ee6ff853ce7ada3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3c7d8a23e404d03c47f9beb82093943
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6fce56343638d540d1c2ae62ccbe5dd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a02539913882cebbb04401247501cfb0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c41fb4190ee3c64c56d99d11cef9d2cc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27136abe2cea735b291d12d87f6dec26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5669764427029858b7ced9e1c54e5dd8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0e8445d3d2dd305b00a29162f9b77c0 |
| publicationDate |
2006-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-69929771-T2 |
| titleOfInvention |
PLASMA DEPOSITION PROCESS OF DIELECTRIC FILMS WITH LOW DIELECTRIC CONSTANT |
| priorityDate |
1998-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |