| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6c8d4dc7bd1a30d8fda907fceaeb4e69 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3472
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3418 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-364
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-349
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-365
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23G1-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G1-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D1-00 |
| filingDate |
1998-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_109a9da6ad11e1437dd2e5df2e8ad539 |
| publicationDate |
2008-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-69838116-T2 |
| titleOfInvention |
Process for treating a substrate surface and treating agent therefor |
| priorityDate |
1997-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |