| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ddcb273a108a5d8472b335280098e06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2656 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01C5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66181 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-334
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
1998-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3696784fa7848a97df7e6483020521d5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db9ac0a83e3351ebf409843abda2e8cc |
| publicationDate |
2007-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-69837033-T2 |
| titleOfInvention |
Apparatus and method for measuring the depth of a recessed boundary layer |
| priorityDate |
1998-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |