| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L45-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F232-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L35-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F232-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L33-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F222-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-375
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-028 |
| filingDate |
1997-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b667444482c086cf68624525e7ef3ce6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55f706d6ba68b9ce784eae9e854ee0e6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_100b3abd43e4cab0ed7b01f7b2cda41a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59eadf285acfb6602f3100b84904090b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1bf1bee3ccbed7137d422a9d597fc748 |
| publicationDate |
2004-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-69726542-T2 |
| titleOfInvention |
Chemically reinforced resist composition |
| priorityDate |
1996-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |