Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e08fd85d97265d6c31ab40f372843d81 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B64G1-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B64G1-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B64G1-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B64G1-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-16 |
filingDate |
1994-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
1999-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebbe374341efeeb6ecaffc5dcee43e43 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3c461cfe5d35c204f2166b830d848c2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2c4bdd707c830318b64ef97fb5f7594 |
publicationDate |
1999-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
DE-69410897-T2 |
titleOfInvention |
Helicon wave plasma source, antenna for such a plasma source, and methods for plasma cleaning and plasma neutralization of surfaces in space with such a plasma source |
priorityDate |
1993-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |