| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e08fd85d97265d6c31ab40f372843d81 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B64G1-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B64G1-22 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B64G1-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B64G1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate |
1994-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1998-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3c461cfe5d35c204f2166b830d848c2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2c4bdd707c830318b64ef97fb5f7594
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebbe374341efeeb6ecaffc5dcee43e43 |
| publicationDate |
1998-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-69410897-D1 |
| titleOfInvention |
Helicon wave plasma source, antenna for such a plasma source, and methods for plasma cleaning and plasma neutralization of surfaces in space with such a plasma source |
| priorityDate |
1993-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |