Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B7-345 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B21-30 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B21-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B7-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
filingDate |
1992-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
1996-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_945a11ce0854a4d9f9cfe91d60ecbd92 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebe98a594d584179e51c81784b7cb747 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44a3ad98615fd3e2880d4d2eae7fe245 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1c7d4ce5ce426b12c04434fd1afd175 |
publicationDate |
1996-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
DE-69207330-T2 |
titleOfInvention |
Control of the large scale topography on silicon substrates |
priorityDate |
1991-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |