Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28512 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-185 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02345 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B1-125 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-3617 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-361 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B1-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
filingDate |
1989-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
1994-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f382afe429467b6a0e2f5ab70b4bf7c1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27f8b301f3479c283903d7821f6b2deb |
publicationDate |
1994-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
DE-68915873-D1 |
titleOfInvention |
Process for the production of monomolecular adsorption films or films built up from monomolecular layers using silanes containing acetylene or diacetylene bonds. |
priorityDate |
1988-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |