| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-4044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T117-10 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B31-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B35-00 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B31-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-73
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B35-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03B20-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N19-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-31 |
| filingDate |
2000-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8487cd38d0d0e0dba76fcdc5f8a68fe5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f0abc1ea0fcb0ae9894099eac5dda7bb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74da08e9a52646553da4fd0622e6bc6d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_352e7bc57560deddcc3c3aff2b9805ee |
| publicationDate |
2006-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-60028091-T2 |
| titleOfInvention |
QUARTZ GLASS COMPONENT FOR SEMICONDUCTOR MANUFACTURING SYSTEM AND METHOD FOR METAL TESTING IN A QUARTZ GLASS COMPONENT |
| priorityDate |
2000-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |