| abstract |
The accelerometer has a p-type Si substrate with an elongated rectangular area (3) free from the SiO2 or Si3N4 film which insulates it from a poly-Si cantilever-structured movable electrode (4) with a contact hole (7) for connection to A1 wiring (6). Fixed electrodes self-aligned on both sides of the movable electrode are formed of impurity diffusion layers (8,9) connected to ion-implanted lines (10,11) also having contact holes (12,14) and wiring (13,15). The acceleration is determined from the fluctuation of current between the fixed electrodes. |