| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_05a31d15146049253ebe5354fed884ea |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32135
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-6659 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 |
| filingDate |
1994-05-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2003-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0852b5eef6c11617ee1b728e5183f41e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b3df1013efac38971d5616b5dec8aaf |
| publicationDate |
2003-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-4415955-C2 |
| titleOfInvention |
Method of manufacturing a semiconductor MOS transistor |
| priorityDate |
1993-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |