| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ddcb273a108a5d8472b335280098e06 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-168 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31058
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7688
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0331 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-095 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105 |
| filingDate |
1994-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_625114ca4626c6baa16c4f64116936a3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06c5ae706762351fe9e3828fb90f615f |
| publicationDate |
1995-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-4401590-A1 |
| titleOfInvention |
Process for the production of structured metallizations |
| abstract |
Prodn. of lacquer structures with overhanging edges involves (a) applying a first photolacquer (2) over a surface; (b) subjecting the photo-lacquer to heating, surface infiltration with chlorobenzene, heating and complete exposure; (c) applying a second photo-lacquer (3) over the entire first photo-lacquer (2); (d) heating and then exposing the second photo-lacquer according to the desired structure; (e) developing the first and second photo-lacquers (2, 3) to form the overhanging edges; and (f) heating the first and second photo-lacquers. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9966568-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2392009-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0910128-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0910128-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19602444-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6582888-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6885150-B2 |
| priorityDate |
1994-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |