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filingDate 1992-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9dcc11968715f2e07d563e588a11d53
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publicationDate 1993-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-4211962-A1
titleOfInvention Method for producing a layer which determines the interfacial energy of workpiece surfaces
abstract Prodn. uses a plasma coating process in a vacuum vessel which contains inlets and outlets for controlling the flow of the material which forms the processing atmos. The produced coating consists essentially of C and H. The process atmos. pref. also contains O2 and/or N2 and/or water and/or halogen(ides) and/or inert gases. The process atmos. is pref. produced from a gaseous hydrocarbon such as methane, ethane, ethene or butane; or is produced from a normally liq. hydrocarbon such as cyclopentane, hexane or benzene. The process is pref. carried out under a microwave field. The reaction pressure is pref. 0.01-100 Pa. The plasma process pref. involves the use of 100 W-5 kW of electrical power per cubic metre of plasma vol. Gas flow is pref. 5-2300 hPa.1/min. per cubic metre of plasma volume. The coating produced is pref. a continuous layer of at least 120 Angstroms thickness; or a not necessarily continuous layer of less than 120 Angstroms. ADVANTAGE - The process gives improved contact angle and improved long-term process stability which improves the economics of the process
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