http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-4114195-A1
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ddcb273a108a5d8472b335280098e06 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-308 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-308 |
filingDate | 1991-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_459d40ccaba0107fa7a12174c2ad252e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4ae00fd9de906c38e4e383ddd93d805 |
publicationDate | 1991-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | DE-4114195-A1 |
titleOfInvention | METHOD FOR IMAGING THE FIELD OR POTENTIAL DISTRIBUTION ON A SAMPLE |
abstract | The method forms images of field or potential distributions on a specimen (IC) by covering the surface of the specimen with an electrooptical medium (EOM), directing a polarised light probe (LA) at the medium and moving it over the surface. The light intensity is modulated at a frequency corresp. to that of a periodic process occurring in the specimen or to a frction of that frequency. Variations in the polarisation of the light probe caused by electrical fields in the electrooptical medium are measured and recorded according to the position of the probe on the specimen's surface. USE/ADVANTAGE - Esp. for forming images of voltage states in microelectronic wiring structures with high degree of time resolution. |
priorityDate | 1991-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
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isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69321 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415742426 |
Total number of triples: 14.