http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-4113667-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-80 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N2-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-04 |
| filingDate | 1991-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0fac95fdcccd1ef2834abc332c54604b |
| publicationDate | 1992-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-4113667-A1 |
| titleOfInvention | PIEZO ACTUATOR |
| abstract | The unit has a piezo-electric element (2) located in a heat sink (3) substantially of copper, the corners of which are cut away to form a lozenge-shaped block. This block has a temp. sensor (7) and is surrounded by four Peltier-effect modules (9 to 12) located around the edges of the block and orientated so that their cold faces (9a to 12b) are in contact with the copper block, while their warm faces (9b to 12b) are in contact with a two-part thermal conductor (14). The latter is square in cross section and features four parallel holes (18 to 21), each contg., a heat pipe (22 to 25) leading to a second copper block that is coupled to a fan-cooled radiator unit by another Peltier-effect module. The temperatures of the piezo-electric element and the workpiece holder are kept identical by using an error value, derived by subtracting the heat sink temp. from the workpiece holder temp. to regulate the operation of the heat sink Peltier-effect modules. ADVANTAGE - Precise temp. regulation of piezo-electric element enables operating frequency to be increased. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19626671-C1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9346139-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7765905-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7574947-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/AT-511551-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7437980-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/AT-511551-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7616084-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114700786-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7275468-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19857247-C1 |
| priorityDate | 1991-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.