http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-4106558-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5c24684033fba97d1ad845ce453a57e3 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P20-55 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F20-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-96 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C69-96 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-30 |
| filingDate | 1991-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4eb684ddbb7e08c15fecfab1eee20be7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d30814fc5b017e08631ff4d98722f85 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7ff19436b4212bfb3e04bdd7bdd97cd |
| publicationDate | 1992-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-4106558-A1 |
| titleOfInvention | NEW POLYMERS WITH UNITS OF ESTERS OF (ALPHA), (BETA) -UNITOUS CARBON ACIDS AND A RADIATION-SENSITIVE MIXTURE MADE WITH THESE POLYMERS |
| abstract | The invention concerns new polymers with units consisting of esters of alpha , beta -unsaturated carboxylic acids and a positively acting radiation-sensitive mixture which contains these polymers as binders and is insoluble or at least only slightly soluble in water or in aqueous-alkaline solutions. The mixture also contains a photoactive compound which, when irradiated, releases a strong acid that splits off protective groups present in the binder and causes a sharp increase in the solubility of the binder, and hence of the mixture, in aqueous-alkaline solution. The mixture is sensitive to UV, electron and X-radiation and is particularly suitable for use as a resist material. The invention also concerns new esters of alpha , beta -unsaturated carboxylic acids from which these polymers are constructed. The invention further concerns a positively or negatively acting radiation-sensitive recording material with a carrier on which a positively or negatively acting layer containing the radiation-sensitive mixture of the invention is located. |
| priorityDate | 1991-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 123.