| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fec576c38e34882531ca37d6b922bf42 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-225 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-097
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-223
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-036 |
| filingDate |
1990-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbc3dbfac5375f84b958298007a2d6ce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_afa4f769cbd8116fcd18648ceb17e03f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_39da7dc82b2c9ca5038773791fdf3dbc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd5ebdb54f6595c5716e211f0e3c8ae6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_474fe1de9377c5b052ef65ca979284e5 |
| publicationDate |
1990-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-4002642-A1 |
| titleOfInvention |
METHOD FOR REFINING EDEL GAS FLUORIDE GAS USED IN EXCIMER LASERS |
| abstract |
In the refining of an excimer laser gas contg. rare gas(es), a fluorine source gas and impurities (opt. including CF4) by sequential contact of the gas with highly reactive metal(s) to convert the fluorine source gas into metal fluoride(s) solid alkali (ne earth) metal cpd(s) to convert most of the fluorides into solid fluorides, and zeolite to remove most of the remaining impurities by adsorption the novelty is that the remaining gas is subsequently contacted with alkali and/or alkaline earth metal(s) at elevated temp. to decompose the CF4 and form a solid metal fluoride and carbon. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9216036-A1 |
| priorityDate |
1989-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |