| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2d935a2fd3e16d8e76f1d76a30aec0a3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B53-017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B53-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B53-017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B53-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B53-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B53-10 |
| filingDate |
1989-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_96f3dd4ce235d0a3870d717d9bc0baa5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_525edfb943823cdaff43f760208d25b7 |
| publicationDate |
1991-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-3926673-A1 |
| titleOfInvention |
METHOD AND DEVICE FOR PROCESSING POLISHING TOWELS IN CHEMOMECHANICAL POLISHING, ESPECIALLY OF SEMICONDUCTOR DISCS |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10004578-C1 |
| priorityDate |
1989-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |