| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6900162c0a64e321929e285aef793d73
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d6dacaa0ceae8e4330441f7bb1f70cb0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_25814a6142a210761d073f257abc2227 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30621
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-308 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate |
1989-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9479de72bfe2bba673cd18a7148d698
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_523e4b77f4df4351c531850ddff6eb75 |
| publicationDate |
1989-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-3914182-A1 |
| titleOfInvention |
DRY WETTING PROCESS FOR SEMICONDUCTORS |
| priorityDate |
1988-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |