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filingDate 1989-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2004-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2004-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-3905626-B4
titleOfInvention Device for growing silicon crystals
abstract Apparatus for growing silicon single crystals by the Czochralski method, comprising: (a) a crucible (16) for receiving a silicon melt; (b) a puller (22) for pulling a crystal nucleus immersed in the silicon melt; (c) an oven (12) for receiving the crucible (16) with an upper wall, the upper wall having an opening located directly above the crucible (16); (d) a cooling bowl (20A) above the crucible (16) for cooling the silicon single crystal from a temperature of 1050-850 ° C in no more than 50 minutes, the cooling bowl being arranged around the silicon single crystal and a plurality projections (50) formed on its inner outer surface; (e) a secondary heater (64) for heating the silicon single crystal so that the residence time of the single crystal in a temperature range of 800-600 ° C. is at least two hours, the secondary heater (64) being attached to the furnace opening and above the cooling bowl (20 ) is arranged.
priorityDate 1988-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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