| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0fee54c23399b55ef3662b9bb9bc57b4 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23G5-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G5-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
1989-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb12fc93a1b29b4f937876bd17ea81f8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c354f23d558601445c1f60312b07e9d3 |
| publicationDate |
1990-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-3901986-A1 |
| titleOfInvention |
DEVICE FOR CLEANING WORKPIECES USING A CHLORINE FLUORED CARBON SOLVENT |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0648548-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5501240-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0462529-A1 |
| priorityDate |
1989-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |