http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-3830440-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D9-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-425 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 |
| filingDate | 1988-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2cfcb9cebc234914d33bcbdd49a9bb7a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b5a94f57dd08908b0c50a9d6bb7ce84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f56523e12ad49886ee9280e548374938 |
| publicationDate | 1989-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-3830440-A1 |
| titleOfInvention | REMOVAL SOLUTION FOR PHOTORESISTS |
| abstract | The remover solution of the invention comprises (A) from 35 to 80% by weight of an alcoholic solvent, such as ethylene glycol monoethyl ether, (B) from 10 to 40% by weight of an organic solvent which is a solvent based on a halogenated hydrocarbon, for example 1,2-dichlorobenzene and methylene chloride, an ethereal solvent, for example tetrahydrofuran, or an aromatic solvent, for example benzene and xylene, and (C) from 0.1 to 25% by weight of a quaternary ammonium compound, such as tetramethylammonium hydroxide and trimethylhydroxyethylammonium hydroxide. In contrast to conventional remover solutions, which can only swell the cured photoresist compositions, the remover solution according to the invention has the ability completely to dissolve a cured photoresist layer, and thus gives a fairly satisfactory result in equipment for removing structured photoresist layers during the production of semiconductor devices. |
| priorityDate | 1987-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 137.