| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1374dd16777534b65ad4422333245af8 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-206
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-202
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32633
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-03921
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32697 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-20 |
| filingDate |
1988-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d99ba9be63f28f31622a417157a2ab96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b55308d748a15cb45f4eab4c02a782c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a866a1bdc85a2b341ad4fb9ced8cdb86 |
| publicationDate |
1988-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-3808974-A1 |
| titleOfInvention |
ARRANGEMENT FOR DEPOSITING A MATERIAL LAYER ON A MOVING CARRIER |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19540255-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19500964-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19540053-A1 |
| priorityDate |
1987-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |