Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2060efca39de37c18aea5b96c97db0b9 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-5093 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52 |
filingDate |
1988-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb88a0c22e2c7616bc9ee41f09570e27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8e14823a8e514ae7af322addfea3bb1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba144380e426e33acf58a30fe89f2248 |
publicationDate |
1989-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
DE-3800712-A1 |
titleOfInvention |
METHOD FOR PLASMA-ACTIVATED REACTIVE DEPOSITION OF ELECTRICALLY CONDUCTIVE MULTI-COMPONENT MATERIAL FROM A GAS PHASE |
priorityDate |
1988-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |