| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7be6f8dcbd9cafd0e70b3d9a8fa6ca44 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 |
| filingDate |
1987-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1992-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7eec0b5cff30b217308fa5aa5594046c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f48942e778d048efca9d2135b50d5e0d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_596334269f7a20b450af7be57ac7b77e |
| publicationDate |
1992-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-3774813-D1 |
| titleOfInvention |
METHOD FOR LOCALIZING A SILICON OXIDE LAYER. |
| priorityDate |
1986-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |