| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ac3e5cf3529cc355c01f69bf7883cbda |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-545 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54 |
| filingDate |
1987-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f453953b7769ad2fbc460c0b7307b41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23769b5eae0c721f52ebd29e0500b396 |
| publicationDate |
1988-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-3710365-A1 |
| titleOfInvention |
METHOD FOR REPRODUCIBLE FORMATION OF MATERIAL LAYERS AND / OR TREATMENT OF SEMICONDUCTOR MATERIAL LAYERS |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5154810-A |
| priorityDate |
1987-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |