| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c72d118f5664072de841f9c5c34b9d99 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-4803 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 |
| filingDate |
1986-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_edfcff2f24f73f23a45a6005f77f3958
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_62afa3f8f6d2add3f0f16a1dc73a5dd9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f49c45f4137d1d86c6e24f62143e269c |
| publicationDate |
1987-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-3629590-A1 |
| titleOfInvention |
METHOD FOR STABILIZING REMOVAL OF ORGANIC MATERIAL FROM AN ORGANIC POLYMER FILM |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-3903153-A1 |
| priorityDate |
1985-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |