| abstract |
A positive-working radiation-sensitive coating solution is described which comprises, as essential components, a radiation-sensitive compound, for example a 1,2-naphthoquinonediazide or a radiation-sensitive combination of compounds, for example a compound having at least one C-O-C bond cleavable by acid and a compound forming a strong acid on irradiation, and an organic solvent or solvent mixture which comprises, at least predominantly, a monomethyl ether of 1,2-propanediol. The solution is less toxic and results in better levelling of the coating than known positive-resist solutions. |