| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_43867d322e887ce7440387bdf2c956b3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L61-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L81-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G75-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03C1-72 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L81-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L81-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L61-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G75-22 |
| filingDate |
1984-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_39320d7fc4ef30fbdf7f1f3f2125a802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0bdf35d8050a11402b1ecaa6ddccfcf5 |
| publicationDate |
1984-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-3416131-A1 |
| titleOfInvention |
FABRIC EFFECTIVE ON ELECTRON RADIATION |
| abstract |
The invention relates to a substance which is characterised by a product of the reaction of (a) a polymer of the formula <IMAGE> where R is a hydrogen atom or a hydrocarbon group having 1-20 carbon atoms, and (b) a phenolic resin of the resol type. A substance of this type is distinguished by high radiation sensitivity and high resistance during dry etching. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19525221-C2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0935172-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6060207-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6225019-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19525221-A1 |
| priorityDate |
1983-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |